Ebook432 pages10 hours
VLSI Metallization
Rating: 5 out of 5 stars
5/5
()
About this ebook
VLSI Electronics Microstructure Science, Volume 15: VLSI Metallization discusses the various issues and problems related to VLSI metallization. It details the available solutions and presents emerging trends.
This volume is comprised of 10 chapters. The two introductory chapters, Chapter 1 and 2 serve as general references for the electrical and metallurgical properties of thin conducting films. Subsequent chapters review the various aspects of VLSI metallization. The order of presentation has been chosen to follow the common processing sequence. In Chapter 3, some relevant metal deposition techniques are discussed. Chapter 4 presents the methods of VLSI lithography and etching. Conducting films are first deposited at the gate definition step; therefore, the issues related to gate metallization are discussed next in Chapter 5.In Chapter 6, contact metallization is elaborated, and Chapter 7 is devoted to multilevel metallization schemes. Long-time reliability is the subject of Chapter 8, which discusses the issues of contact and interconnect electromigration. GaAs metallization is tackled in Chapter 9. The volume concludes with a general discussion of the functions of interconnect systems in VLSI.
Materials scientists, processing and design engineers, and device physicists will find the book very useful.
This volume is comprised of 10 chapters. The two introductory chapters, Chapter 1 and 2 serve as general references for the electrical and metallurgical properties of thin conducting films. Subsequent chapters review the various aspects of VLSI metallization. The order of presentation has been chosen to follow the common processing sequence. In Chapter 3, some relevant metal deposition techniques are discussed. Chapter 4 presents the methods of VLSI lithography and etching. Conducting films are first deposited at the gate definition step; therefore, the issues related to gate metallization are discussed next in Chapter 5.In Chapter 6, contact metallization is elaborated, and Chapter 7 is devoted to multilevel metallization schemes. Long-time reliability is the subject of Chapter 8, which discusses the issues of contact and interconnect electromigration. GaAs metallization is tackled in Chapter 9. The volume concludes with a general discussion of the functions of interconnect systems in VLSI.
Materials scientists, processing and design engineers, and device physicists will find the book very useful.
Related to VLSI Metallization
Titles in the series (17)
VLSI Electronics Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5Surface and Interface Effects in VLSI Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5Plasma Processing for VLSI Rating: 5 out of 5 stars5/5Materials and Process Characterization Rating: 0 out of 5 stars0 ratingsVLSI Design Rating: 5 out of 5 stars5/5Metal – Semiconductor Contacts and Devices Rating: 0 out of 5 stars0 ratingsGaAs Microelectronics: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI Metallization Rating: 5 out of 5 stars5/5Beam Processing Technologies Rating: 0 out of 5 stars0 ratingsVLSI in Medicine Rating: 5 out of 5 stars5/5Lithography for VLSI: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI and Computer Architecture Rating: 5 out of 5 stars5/5
Related ebooks
Lithography for VLSI: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5GaAs Microelectronics: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5Plasma Processing for VLSI Rating: 5 out of 5 stars5/5Materials and Process Characterization Rating: 0 out of 5 stars0 ratingsVLSI Electronics Rating: 0 out of 5 stars0 ratingsInfrared and Millimeter Waves V11: Millimeter Components and Techniques, Part III Rating: 0 out of 5 stars0 ratingsInfrared and Millimeter Waves V14: Millimeter Components and Techniques, Part V Rating: 0 out of 5 stars0 ratingsVLSI Handbook Rating: 5 out of 5 stars5/5Advanced CMOS Process Technology Rating: 1 out of 5 stars1/5Advances in Microwaves: Volume 1 Rating: 5 out of 5 stars5/5Laser Annealing of Semiconductors Rating: 0 out of 5 stars0 ratingsPlasma Diagnostics: Surface Analysis and Interactions Rating: 0 out of 5 stars0 ratingsAdvanced MOS Device Physics Rating: 0 out of 5 stars0 ratingsProbabilistic Methods in Applied Mathematics: Volume 3 Rating: 0 out of 5 stars0 ratingsVLSI Design Rating: 5 out of 5 stars5/5Ion Implantation and Beam Processing Rating: 5 out of 5 stars5/5Silicon Integrated Circuits Rating: 4 out of 5 stars4/5Advances in Microwaves: Volume 3 Rating: 0 out of 5 stars0 ratingsMetal – Semiconductor Contacts and Devices Rating: 0 out of 5 stars0 ratingsVLSI in Medicine Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Implementations for Image Communications Rating: 0 out of 5 stars0 ratingsVLSI and Computer Architecture Rating: 5 out of 5 stars5/5Silicides for VLSI Applications Rating: 0 out of 5 stars0 ratingsOptical Shop Testing Rating: 3 out of 5 stars3/5Mathematical Experiments on the Computer Rating: 0 out of 5 stars0 ratingsMedical Engineering: Projections for Health Care Delivery Rating: 0 out of 5 stars0 ratings3D NAND Complete Self-Assessment Guide Rating: 0 out of 5 stars0 ratingsSEM Microcharacterization of Semiconductors Rating: 0 out of 5 stars0 ratings
Mechanical Engineering For You
Basic Engineering Mechanics Explained, Volume 1: Principles and Static Forces Rating: 5 out of 5 stars5/5The CIA Lockpicking Manual Rating: 5 out of 5 stars5/5Mechanical Engineering Rating: 5 out of 5 stars5/5How to Walk on Water and Climb up Walls: Animal Movement and the Robots of the Future Rating: 3 out of 5 stars3/5Basic Machines and How They Work Rating: 4 out of 5 stars4/5How to Repair Briggs and Stratton Engines, 4th Ed. Rating: 0 out of 5 stars0 ratingsSmall Gas Engine Repair, Fourth Edition Rating: 0 out of 5 stars0 ratingsZinn & the Art of Mountain Bike Maintenance: The World's Best-Selling Guide to Mountain Bike Repair Rating: 0 out of 5 stars0 ratingsMechanical Engineer's Handbook Rating: 4 out of 5 stars4/5Airplane Flying Handbook: FAA-H-8083-3C (2024) Rating: 4 out of 5 stars4/5How to Run a Lathe - Volume I (Edition 43) The Care and Operation of a Screw-Cutting Lathe Rating: 5 out of 5 stars5/5301 Top Tips for Design Engineers: To Help You 'Measure Up' in the World of Engineering Rating: 5 out of 5 stars5/5Einstein's Fridge: How the Difference Between Hot and Cold Explains the Universe Rating: 4 out of 5 stars4/5FreeCAD Basics Tutorial Rating: 3 out of 5 stars3/5Power Supply Projects: A Collection of Innovative and Practical Design Projects Rating: 3 out of 5 stars3/5Operational Amplifier Circuits: Analysis and Design Rating: 5 out of 5 stars5/5Tides: The Science and Spirit of the Ocean Rating: 4 out of 5 stars4/5Pilot's Handbook of Aeronautical Knowledge (2024): FAA-H-8083-25C Rating: 0 out of 5 stars0 ratingsTroubleshooting and Repairing Diesel Engines, 5th Edition Rating: 3 out of 5 stars3/5Applied Mathematics: Made Simple Rating: 4 out of 5 stars4/5The Physics of Baseball: Third Edition, Revised, Updated, and Expanded Rating: 0 out of 5 stars0 ratingsOrbital Mechanics: For Engineering Students Rating: 5 out of 5 stars5/5The Science of Everyday Life: An Entertaining and Enlightening Examination of Everything We Do and Everything We See Rating: 0 out of 5 stars0 ratingsEPA 608 Study Guide: HVAC, #1 Rating: 4 out of 5 stars4/5Hydraulics and Pneumatics: A Technician's and Engineer's Guide Rating: 4 out of 5 stars4/5A Dynamical Theory of the Electromagnetic Field Rating: 0 out of 5 stars0 ratings
Reviews for VLSI Metallization
Rating: 5 out of 5 stars
5/5
1 rating0 reviews
Book preview
VLSI Metallization - Academic Press
Enjoying the preview?
Page 1 of 1